VELDHOVEN, The Netherlands — ASML didn't even mention the acronym EUV in formal presentations to international press here a year ago. This year they showed the same group a rough road map for extreme ...
In the late 1990s, a group led by Intel launched a consortium to propel extreme ultraviolet (EUV) lithography into the mainstream. Originally, the consortium, dubbed the EUV LLC, envisioned the advent ...
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